Ai 500 Watts 13MHz RF Generator for Up To 150mm Tube Furnaces
Ai 500 Watts 13MHz RF Generator for Up To 150mm Tube Furnaces
Ai 500 Watts 13MHz RF Generator for Up To 150mm Tube Furnaces
Ai 500 Watts 13MHz RF Generator for Up To 150mm Tube Furnaces
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Ai 500 Watts 13MHz RF Generator for Up To 150mm Tube FurnacesAi 500 Watts 13MHz RF Generator for Up To 150mm Tube FurnacesAi 500 Watts 13MHz RF Generator for Up To 150mm Tube FurnacesAi 500 Watts 13MHz RF Generator for Up To 150mm Tube Furnaces

Ai 500 Watts 13MHz RF Generator for Up To 150mm Tube Furnaces

Save $559.60 USD
Power Lab Supply 2SKU: RF500
Price:
$13,430.40 USD $13,990.00 USD
Description

Ai RF500 series RF generators provide 500 watts of power and a 13.56MHz frequency, they can accommodate up to 150mm OD tubes and are ideal for PECVD (Plasma Enhanced Chemical Vapor Deposition) systems in application like plasma etching, plasma cleaning and plasma polymerization.

 

 

 

 

 

 

 

Specifications

 

 Electrical requirements  208-240 volts 50/60 Hz
 Output power  5 to 500 watts, adjustable in +/-1% step
 RF frequency
  13 MHz with +/-0.005% stability
 Reflection power
  200 watts max.
 Matching  Automatic
 RF output port
  50 Ω, N-type, female
 Cooling  Air

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