Description
Ai RF500 series RF generators give you 500 watts of power and 13.56MHz frequency, they can accommodate up to 150mm OD tubes for you DIY PECVD (Plasma Enhanced Chemical Vapor Deposition) systems for plasma etching, plasma cleaning and plasma polymerization.
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| Ā Electrical requirements | Ā 208-240 volts 50/60 Hz |
| Ā Output power | Ā 5 to 500 watts, adjustable in +/-1% step |
| Ā RF frequency |
Ā 13 MHz with +/-0.005% stability |
| Ā Reflection power |
Ā 200 watts max. |
| Ā Matching | Ā Automatic |
| Ā RF output port |
Ā 50 Ī©, N-type, female |
| Ā Cooling | Ā Air |
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