Description
Ai RF500 series RF generators provide 500 watts of power and a 13.56MHz frequency, they can accommodate up to 150mm OD tubes and are ideal for PECVD (Plasma Enhanced Chemical Vapor Deposition) systems in application like plasma etching, plasma cleaning and plasma polymerization.
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| Ā Electrical requirements | Ā 208-240 volts 50/60 Hz |
| Ā Output power | Ā 5 to 500 watts, adjustable in +/-1% step |
| Ā RF frequency |
Ā 13 MHz with +/-0.005% stability |
| Ā Reflection power |
Ā 200 watts max. |
| Ā Matching | Ā Automatic |
| Ā RF output port |
Ā 50 Ī©, N-type, female |
| Ā Cooling | Ā Air |
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