VACUUM PUMP MOBILE CART ONLY AVAILABLE IF YOU PURCHASE A PUMP AND A DIGITAL VACUUM CONTROLLER.
STF1200 series Chemical Vapor Deposition (CVD) and Plasma-Enhanced Chemical Vapor Deposition (PECVD) single or multi-zone split tube furnaces feature the famous Kanthal (Sweden) wire heating elements embedded in high quality Mitsubishi (Japan) alumina fiber insulation. All steel dual-layer housing ensures durability and helps minimize heat loss to exterior surface.
Furnace operation is controlled by Eurotherm (UK) digital controller with built-in digital communication, allowing the user to connect to a PC for remote control and monitoring of the furnace. You can also save or export test results.
Controller Option:
3504 can do 50 segments programmer (ramp and dwelling)
Features
- Compact and portable design.
- Lower processing temperatures required compare to conventional CVDs.
- Film stress can be controlled by high/low frequency mixing techniques.
- Top-open furnace chamber for fast and easy tube access.
- Standard package includes set of stainless steel vacuum sealing flanges with valves and pressure meter.
- Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot.
- Multiple atmosphere processes in a single cycle are possible (ex: binder burn out in air and parts sintering under rough vacuum or inert gas environment.)
- Built-in amp meter and dual voltmeters for easy monitoring and troubleshooting.
- Built-in computer interface.
- Long life type K thermocouple.
- Furnace rail option gives you ultra fast cooling rates
Safety
- Overheat protection shuts down the furnace if temperature is outside of acceptable range (refer to controller's manual) or when the thermocouple is broken or malfunctions.
- Power failure protection resumes furnace operation right after the point of failure when power is reestablished.
Warning! NEVER fill furnace with explosive gases, including Hydrogen, Carbon Monoxide and Methane.
| Tube material | Quartz |
| Heating element | Kanthal® (Sweden) A1 2.0 resistance coil wire |
| Max. vs constant working temperatures | 1200°C max. and 1100°C constant |
| Thermo couple type | K |
| Refractory lining | Mitsubishi® (Japan) 1500 grade fiber alumina |
| Temperature controller | Eurotherm® (UK) |
| Maximum heating rate | < 30°C / min |
| Temperature controller precision |
+/- 1°C (+/- 1.8°F) |
| Vacuum sealing flange kit |
Stainless steel vacuum sealing flanges with one vacuum gauge, |
| Electrical requirements | 208-240VAC, 50/60 Hz, single phase |
RF generator specifications
| Electrical requirements | 208-240 volts 50/60 Hz |
| Output power | 5 to 500 watts, adjustable in +/-1% step |
| RF frequency |
13 MHz with +/-0.005% stability |
| Reflection power |
200 watts max. |
| Matching | Automatic |
| RF output port |
50 Ω, N-type, female |
| Cooling | Air |
|
Part description |
Quantity |
Part image |
| STF1200 split tube furnace | 1 set | |
| Multi-channel gas supply system | 1 set | |
| Plasma RF power supply (optional) | 1 set | |
| Vacuum pump and enclosure (optional) | 1 set | |
| Quartz tube | 1 pc | |
| Stainless steel vacuum sealing flanges w/ pressure meter | 1 set |
|
| Stainless steel hook | 1 pc |
|
| Thermal block | 1 set |
|
| Thermal gloves | 1 pair |
|
| Spare fuse | 2 pcs |
|
| USB/RS485 computer interface kit | 1 set |
|
| Furnace and Shimaden controller manual | 2 pcs |
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